Benchmark calculations of electron transport in RF fields

Benchmark calculations have been performed for electron transport coefficients in radio frequency electric and magnetic fields by applying a Monte Carlo simulation code. The results of simulations are compared with those predicted by a time dependent multi-term solution of Boltzmann's equation and found to be in a good agreement. The comparison validates the basis of transport theory in time dependent fields as well as numerical integrity of both approaches. Certain trends in temporal profiles of electron transport coefficients as a function of frequency of the applied fields are addressed using physical arguments.

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SPIG 2004 22nd Summer School and International symposium on the Physics of Ionized Gases

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978-0-7354-0224-9

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