Ion irradiation as a tool for modifying the surface and optical properties of plasma polymerised thin films

Journal Publication ResearchOnline@JCU
Grant, Daniel S.;Bazaka, Kateryna;Siegele, Rainer;Holt, Stephen A.;Jacob, Mohan
Abstract

Radio frequency (R.F.) glow discharge polyterpenol thin films were prepared on silicon wafers and irradiated with I10+ ions to fluences of 1 × 1010 and 1 × 1012 ions/cm2. Post-irradiation characterisation of these films indicated the development of well-defined nano-scale ion entry tracks, highlighting prospective applications for ion irradiated polyterpenol thin films in a variety of membrane and nanotube-fabrication functions. Optical characterisation showed the films to be optically transparent within the visible spectrum and revealed an ability to selectively control the thin film refractive index as a function of fluence. This indicates that ion irradiation processing may be employed to produce plasma-polymer waveguides to accommodate a variety of wavelengths. XRR probing of the substrate-thin film interface revealed interfacial roughness values comparable to those obtained for the uncoated substrate's surface (i.e., both on the order of 5 Å), indicating minimal substrate etching during the plasma deposition process.

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360

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1872-9584

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6

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Elsevier

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DOI

10.1016/j.nimb.2015.07.109