Temporal and spatial relaxation of electrons in magnetized low-temperature plasmas
Conference Publication ResearchOnline@JCUAbstract
[Extract] Non-equilibrium, low-temperature plasma discharges sustained and controlled by electric and magnetic fields are widely used in materials processing, gas lasers and other applications. Within these discharges the electric and magnetic fields can vary in space, time and orientation depending on the type of discharge. One particular example of most recent interest for the authors is the magnetron discharge. This type of discharge is predominantly used in the sputtering deposition of thin films [1] where magnetic field confines energetic electrons near the cathode. These confined electrons ionize neutral gas and form a high density plasma near the cathode surface while heavy ions and neutrals impinge on the solid surface ejecting material from that surface which is then deposited on the substrate. Within these discharges the angle between the electric and magnetic fields varies and thus for a detailed understanding and accurate modeling of this type of discharge, a knowledge of both electron and ion transport in gases under the influence of electric and magnetic fields at arbitrary angles is essential.
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ESCAMPIG XX 20th European Conference on the Atomic and Molecular Physics of Ionized Gases
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2
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Novi Sad, Serbia
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Institute of Physics
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Belgrade, Serbia
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